ULVAC

ULVAC, Inc. engages in vacuum equipment and applications business in Japan and internationally. It offers FPD manufacturing equipment, which includes sputtering, plasma CVD, organic EL manufacturing, roll-type vacuum evaporation, vacuum evaporation, roll-up sputtering equipment, and other equipment; and semiconductor and electronic component manufacturing equipment including etching, ion implantation, ashing, wafer pre-treatment, ultra-high vacuum equipment, etc. The company also provides various vacuum pumps, such as dry, oil rotary, mechanical booster, oil diffusion, ion, turbomolecular, and cryopumps; vacuum gauges and valves, leak detectors, gas analyzers, deposition power supplies, deposition controllers, vacuum transfer robots, various vacuum parts, etc. In addition, it offers general industrial equipment comprising vacuum melting, heat treatment, sintering, and brazing furnace; and freeze-vacuum drying, vacuum distillation equipment, helium leak test equipment, etc. Additionally, the company provides auger electron, X-ray photoelectron, and secondary ion mass spectrometer; and mask blanks for semiconductors, as well as flat panel display panel, contracted film formation processing, etc. Further, the company provides sputtering target, vapor deposition, titanium/tantalum processed, high melting point active metals, surface treatment, ultrafine particles, and other materials. ULVAC, Inc. was incorporated in 1929 and is headquartered in Chigasaki, Japan.